| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_524c96a5c17102f1fa1eaa31eaedf0a3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5013 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02 |
| filingDate |
2001-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f7cb3b8ff12e6fe4d9f5b76322b5e79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b16348eb033edec86e7800572c416e71 |
| publicationDate |
2002-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0246344-A1 |
| titleOfInvention |
Method for cleaning etcher parts |
| abstract |
The invention relates to a method useful in removing etch residue from etcher equipment parts. The compositions used are aqueous, acidic compositions containing fluoride and polar, organic solvents. The compositions are free of glycols and hydroxyl amine and have a low surface tension and viscosity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008012231-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008012231-A3 |
| priorityDate |
2000-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |