| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_67a2784ee74c8b8fd0f241c0da8c5132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1cb98b206ef0b0fce35008f400e2d632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6467715dc8f490187a0ca0eac761ccf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f5e742320fb080c4696960e4aa56010
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69443781a6a2304c6578085cf969b702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97411dac2a9aceddcf1140e97aad0a57 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S204-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12493 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-12 |
| filingDate |
2001-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3d85c92c91b87e7e3698a66ad163897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23ceec7eb5f42d5c433daa62ec1133b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8397034df6cf3e500830f77b9fde1ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b836472f31a1d0ef3504b3f7c51182be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e02ff93e4c7d4321c909fddb1435646 |
| publicationDate |
2002-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0245476-A9 |
| titleOfInvention |
Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
| abstract |
A process and reactor for electrochemical processing of at least one surface of a microelectronic workpiece is set forth. The reactor comprises a reactor head including a workpiece support that has one or more electrical contacts positioned to make electrical contact with the microelectronic workpiece. The reactor also includes a processing container (37) having a plurality of anodes (1095) disposed at different elevation in the principal fluid flow chamber so as to place them at different distances from a microelectronic workpiece under the process. One or more of the plurality of anodes may be in close proximity to the workpiece during the process. Still further, one or more of the plurality of anodes may be a virtual anode. |
| priorityDate |
2000-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |