http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0229390-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-88 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2001-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7908a536a5e384e9c46f41bd1b6fc416 |
| publicationDate | 2002-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0229390-A2 |
| titleOfInvention | Method and apparatus to provide for automated process verification and hierarchical substrate examination |
| abstract | The present invention generally provides an apparatus and a method for inspecting a substrate in a processing system. In one embodiment, a substrate process inspection system (100) comprises a plurality of optical inspection systems (105) each configured to perform an optical inspection process at a first degree of optical resolution and an inspection platform (150) configured to perform an optical inspection process at a second degree of optical resolution. The plurality of optical inspection systems each comprises a transmitter unit and a receiver unit. The substrate process inspection system further comprises a controller system (102) connected to the plurality of optical inspection systems and the inspection platform. The controller system is configured to (i) process optical signal information indicative of a topographical condition on a substrate inspected by at least one of the plurality of optical inspection systems and (ii) in response to the topographical condition, cause execution of one of a plurality of subsequent substrate handling steps. In one embodiment, a first substrate handling step comprises transferring the substrate to the inspection platform for further optical inspection. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004044974-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004044974-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11624607-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11474028-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11276157-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11168978-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11703459-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100349273-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637031-B2 |
| priorityDate | 2000-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.