| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3314680c89381570dd7dc2bafb74a388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad73c6949871f8f5bc1a0194442ef69c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5694793e73234fc28830cad2d7a160e7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-39 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4133 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-39 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-59 |
| filingDate |
2001-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd4cda5b2d5482448a19db48d4df0366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af5729cede1271e81c325565845545f |
| publicationDate |
2002-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0229358-A9 |
| titleOfInvention |
In-situ thickness and refractive index monitoring and control system for thin film deposition |
| abstract |
A method of determining thickness and refractive index of an optical thin film is described. The method includes generating a diagnostic light beam having a first and a second wavelength. The method also includes measuring unattenuated light intensities at the first and the second wavelength of the diagnostic light beam. The method also includes measuring attenuated light intensities at the first and the second wavelength of the diagnostic light beam after transmission through the optical thin film. A null light intensity for the diagnostic light beam at the first and second wavelength is also determined. A first and second normalized intensity function is determined using the measured unattenuated light intensities, the measured attenuated light intensities, and the measured null light intensities. The thickness and refractive index of the optical thin film is then determined by solving the first and second normalized intensity function for thickness and refractive index. |
| priorityDate |
2000-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |