| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2001-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47575b318881fbe64430385748a02011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f07976cb3a72776daa97e5e4a9a1cce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0c19e7fa442265440800177cb3069f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_357569b7097e43f1aa598e4a374b8b1c |
| publicationDate |
2002-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0221216-A2 |
| titleOfInvention |
Polymers and photoresist compositions comprising electronegative groups |
| abstract |
The present invention includes polymers and photoresist compositions that comprise the polymers as a resin binder component. Photoresists of the invention include chemically-amplified positive-acting resists that can be effectively imaged at short wavelengths such as sub-200 nm, particularly 157 nm. Particular polymers and photoresists of the invention include at least one electronegative group that reduces 157 nm absorbance of a wide spectrum of organic groups including aromatic groups such as phenolic moieties. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358027-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7138550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6919160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7479364-B2 |
| priorityDate |
2000-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |