| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da3b6ec3e3e092be5a8d375f17a6423b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 |
| filingDate |
2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7a7901c30252f303eef35c044718e10 |
| publicationDate |
2002-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0209161-A2 |
| titleOfInvention |
Process for cleaning ceramic articles |
| abstract |
A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a chemical stripping agent and then using a pelletized CO2 cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005322250-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7211156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6565667-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6554909-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100470349-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7501370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7053411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6855576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8058174-B2 |
| priorityDate |
2000-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |