| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3bf96311fde209e9fad008b4b8616252 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-2803
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2002-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26470e1eb98d245bbbc35e6884102191 |
| publicationDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-02084403-A1 |
| titleOfInvention |
Process for producing acid sensitive liquid composition containing a carbonate |
| abstract |
Disclosed is a method for producing an acid sensitive liquid composition. The method involves passing an acid sensitive liquid composition contained a carbonate represented by the formula ROC(=O(OR1 wherein R and R1 independently are a hydrocarbyl group of 1 to about 10 carbon atoms, through at least one of the following two filter sheets: (a) a filter sheet containing a selfsupporting fibrous matrix having immobilized therein a particulate filter aid and a particulate ion exchange resin having an average particle size of from about 2 to about 10 microns, wherein the particulate filter aid and ion exchange resin particles are distributed substantially uniformly throughout a cross-section of said matrix; and/or (b) a filter sheet containing a self-supporting matrix of fibers having immobilized therein particulate filter aid and binder resin, and having an average pore size of about 0.05 to 0.5 νmum. Also disclosed is a method for treating a film of photoresist composition disposed on a surface, which involves contacting the photoresist composition with an acid sensitive liquid composition prepared by the aforementioned method, in an amount sufficient to produce a substantially uniform film thickness of the photoresist compostion across the film surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116531789-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116531789-A |
| priorityDate |
2001-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |