| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-38 |
| filingDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee2c2c1fd0a72a34b3facb573f1f537b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc06ea92ce3040da7dded090451249e |
| publicationDate |
2002-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0201628-A2 |
| titleOfInvention |
Formation of boride barrier layers using chemisorption techniques |
| abstract |
A method of forming a boride layer for integrated circuit fabrication is disclosed. In one embodiment, the boride layer is formed by chemisorbing monolayers of a boron-containing compound (305) and one refractory metal compound (307) onto a substrate. In an alternate embodiment, the boride layer has a composite structure. The composite boride layer structure (409) comprises two or more refractory metals (M1, M2). The composite boride layer is formed by sequentially chemisorbing monolayers of a boron compound (405) and two or more refractory metal compounds (407) on a substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008137070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9051641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119210-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7780788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I394234-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7576012-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6831004-B2 |
| priorityDate |
2000-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |