| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2ec52c87addc6575f3d79f8064e92d30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-28033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-2803
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J39-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-18 |
| filingDate |
2001-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92575c822c5cfddbb59091b1c42d8348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f37224b0b1b0691bebd8a284aebd43d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f9221a84578bccb715b33b1bf6dece3 |
| publicationDate |
2002-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0200325-A2 |
| titleOfInvention |
Filter sheet and process for purifying photoresist composition employing the filter sheet |
| abstract |
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing inonic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom. |
| priorityDate |
2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |