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filingDate 2001-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d34f3a2c72b9e3e06bbce760e61102a8
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publicationDate 2001-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0195468-A1
titleOfInvention Micromechanical device with damped microactuator
abstract A damped micromechanical device (9) comprising a housing (11) provided with an internal fluid-tight chamber (12) and an electrically-driven microactuator (13) disposed in the fluid-tight chamber. The microactuator has a movable structure (42) capable of being moved between first and second positions at a resonant frequency. A damping fluid (16) is disposed in the fluid-tight chamber for damping the movement of the movable structure at the resonant frequency.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023002215-A1
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priorityDate 2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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