Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a1f32d0454c277083c101a3ebe46b65c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a9005ee08772b948f85b536287bba11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_46e36817a6ed77fef74cec41baf4ed18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0d160985ea3f56b8f587971529e2eef |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N1-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0051 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-00 |
filingDate |
2001-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d34f3a2c72b9e3e06bbce760e61102a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93e8d6e27ae2102dfcc4f8600884a77e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7b3636aab5abbd2a9371165559ce77a |
publicationDate |
2001-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-0195468-A1 |
titleOfInvention |
Micromechanical device with damped microactuator |
abstract |
A damped micromechanical device (9) comprising a housing (11) provided with an internal fluid-tight chamber (12) and an electrically-driven microactuator (13) disposed in the fluid-tight chamber. The microactuator has a movable structure (42) capable of being moved between first and second positions at a resonant frequency. A damping fluid (16) is disposed in the fluid-tight chamber for damping the movement of the movable structure at the resonant frequency. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023002215-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005018321-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11772959-B2 |
priorityDate |
2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |