| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2e762ee864ac123f79d747ee0d3a257 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate |
2001-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95201072723a51d96380bdb40d061b4e |
| publicationDate |
2001-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0191523-A2 |
| titleOfInvention |
Extreme ultraviolet source based on colliding neutral beams |
| abstract |
A source of photons includes a discharge chamber, a plurality of ion beam sources in the discharge chamber and a neutralizing mechanism. Each of the ion beam sources electrostatically accelerates a beam of ions of a working gas toward a plasma discharge region. The neutralizing mechanism at least partially neutralizes the ion beams before they enter the plasma discharge region. The neutralized beams enter the plasma discharge region and form a hot plasma that radiates photons. The photons may be in the soft X-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100375219-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10256663-B3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011529612-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6946669-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02102122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10305701-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6728337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004051698-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004051698-A3 |
| priorityDate |
2000-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |