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publicationDate 2001-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0181525-A1
titleOfInvention Detergent composition
abstract A detergent composition characterized by comprising (1) at least one of fluoride salts and hydrogen fluoride salts, (2) an organic solvent having a heteroatom, and (3) water; a method of cleansing a metal gate, contact hole, via hole, and capacitor with the composition; a method of removing a residual polymer derived from a resist; and a method of cleansing after CMP.
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