http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0167140-A1

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publicationDate 2001-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0167140-A1
titleOfInvention Substrate provided with an anti-reflective coating, and method of providing an anti-reflective coating
abstract A substrate (22) is provided with a layer (21) comprising organo-metallic components (23) in a solvent having a high-boiling point component (24). As the solvent is removed, the high-boiling point component phase separates, forming larger globules (26) in a matrix (25). The-high-boiling point component is thereafter removed, leaving a matrix (12) of a substance such as SiO2, in which cavities (13) filled with gas or air of vacuum are present. The cavities have sizes from 5 to 200 nm.
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