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filingDate 2000-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4445f6592bad8f626feef437225ee87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af7a00e1bda8af112e28c3d97d28c849
publicationDate 2001-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0147831-A1
titleOfInvention Carbon-containing aluminum nitride sintered compact, and ceramic substrate for use in apparatus for manufacturing and inspecting semiconductor
abstract A carbon-containing aluminum nitride sintered compact comprising an aluminum nitride matrix and, incorporated therein, a carbon which has peaks appearing in the vicinity of 1580 cm-1 and 1355 cm-1 as measured by the laser Raman spectrometry. The carbon-containing aluminum nitride sintered compact does not suffer from a short circuit due to its satisfactorily high volume resistivity of at least 1 x 108 Φ • cm in a high temperature region of 200 °C or higher (for example, 500 °C or so), is excellent in hiding properties, is increased with respect to radiant heat and can secure high accuracy in the measurement by a surface thermometer.
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priorityDate 1999-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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