http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0141180-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f3f10b622033458483b94a69e59c2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6a123fae19df5b66979245cb41195f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2608 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-12 |
| filingDate | 2000-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af181553ee66a13052d8786b9f8d06eb |
| publicationDate | 2001-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0141180-A1 |
| titleOfInvention | Detector for a scanning electron microscope with variable pressure and a scanning electron microscope comprising a detector of this type |
| abstract | The invention relates to a detector for a scanning electron microscope with a high pressure in the sampling chamber. Said detector has a first electrode (50; 51; 52) for accelerating electrons emerging from a sample (11) which is held by the sample holder and at least a second electrode (30; 30a - 30i; 31), whose end facing the sample holder is closer to the latter than the first electrode and whose potential lies between that of the first electrode and the potential of the beam deflection tube (21). The volume of the secondary electronic cascade is increased by the second electrode. In an alternative embodiment for a gas scintillation detector, an elongated sector, in which the amplification factor for secondary electrons is approximately 1 adjoins a sector of high secondary electron amplification. The latter is used to generate a relatively large electron stream and the elongated sector to generate a powerful photon signal, whilst maintaining the photon flux. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1540693-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1299897-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1540693-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CZ-302126-B6 |
| priorityDate | 1999-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.