| abstract |
The invention relates to a mass-sensitive sensor comprised of an acoustic surface wave component based on shear waves. The aim of the invention is to design the mass-sensitive sensor of the aforementioned type such that, in the instance of increased sensitivity, the sensitive aluminum structures of the sensor are sufficiently protected against corrosion. To this end, the active surface of the sensor supports two different layers of which one is a parylene layer having a thickness between 0.2 and < 1.6 νm, whereby this parylene layer serves to generate Love waves, and the other is a wear layer which interacts with an analyte contained in a medium. |