| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2000-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4441645069dfb6983895685156f30a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef00b894042cc0b574c521d443c6e9a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_728c77721e1a707b77c4cce75dbe14b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1651255ce2e85b37e7538a7dc17b7736 |
| publicationDate |
2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0129281-A9 |
| titleOfInvention |
Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions |
| abstract |
Apparatus and method for abatement of effluent from multi-component metal oxides deposited by CVD processes using metal source reagent liquid solutions which comprise at least one metal coordination complex including a metal to which is coordinatively bound at least one ligand in a stable complex and a suitable solvent medium for that metal coordination complex e.g., a metalorganic chemical vapor deposition (MOCVD) process for forming barium strontium titanate (BST) thin films on substrates. The effluent is sorptively treated to remove precursor species and MOCVD process by-products for the effluent. An endpoint detector (62) such as a quartz microbalance detector may be employed to detect incipient breakthrough conditions in the sorptive treatment unit. |
| priorityDate |
1999-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |