| abstract |
There is provided an array of fluoro-substituted silsesquioxane thin film precursors having a structure wherein fluoro groups are bonded to the silicon atoms of a silsesquioxane cage. In the first aspect, the present invention provides a composition comprising a vaporized material having the formula [F-SiO1.5]x[H-SiO1.5]Y, wherein x + y = n, n is an integer between 2 and 30, x is an integer between 1 and n and y is a whole number between 0 and n. Also provided are films made from these precursors and objects comprising these films. |