| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da3b6ec3e3e092be5a8d375f17a6423b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2993
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F7-442 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F7-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2000-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba1f02f9e99e5b3eeead6099e021422d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c5ef3edb5a6f471342f085b05e02d8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8ad764547a9c5058155e08d9105271d |
| publicationDate |
2001-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0125366-A1 |
| titleOfInvention |
Cmp products |
| abstract |
CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1771198-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7638105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1234800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7169322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004089827-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2366665-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004089827-A3 |
| priorityDate |
1999-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |