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filingDate 2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0122028-A1
titleOfInvention Optical method for the characterization of integrated circuits
abstract Disclosed is a method for characterizing a sample (315) having a structure (310) disposed on or within the sample (315), comprising the steps of applying a first pulse of light to a surface (312) of the sample for creating a propagating strain pulse (316, 314) in the sample (315), applying a second pulse of light to the surface (312) so that the second pulse of light interacts with the propagating strain pulse (316, 314) in the sample (315), sensing from a reflection of the second pulse a change in optical response of the sample (315), and relating a time of occurence of the change in optical response to at least one dimension of the structure (310).
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