http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0119935-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcd1a217ba95dc487e1e6ee172da349
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
filingDate 2000-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d93d71bcc3d0bcc673c449e2146b5d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c406eff3d17cb2629bf224f8cb4869f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b8cac9a1a175c90ba963bf2022b916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e5346dbd19a0482f2a85e64d83250b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60e5b3d5479d9b0b201e84eec03cd0a
publicationDate 2001-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0119935-A1
titleOfInvention Slurry for forming insoluble silicate during chemical-mechanical polishing
abstract An aqueous slurry for chemical-mechanical polishing of silica substrates comprising: water, submicron abrasive particles, and a silica protecting agent having a solubility in water of less than 0.01 g/100 mL. The silica protecting agent is selected from alumina and zirconia.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6776810-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112266729-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7306637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11161751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6916742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101109334-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101263209-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8353740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844259-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7708904-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007021716-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007021716-A2
priorityDate 1999-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0786504-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770103-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9713889-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5756398-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0844290-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10690
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395690
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226601827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226601826
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6435836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226421167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129618461
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21188867
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393853
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226401602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20074596
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405522
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422695
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10198308

Total number of triples: 68.