| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a141a9867a232dcc748117818e055c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9d2283a1e5c65cee0655834d265e2f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dc3cd7c82a9d90e2536389c31e8bfaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_715a3c8c23494b886c79ad08d1120949 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2000-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_513639db682121ff4197f41c2dabefcd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee34fc72314d9703a8c50733f969ffc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_765bfc3e8fb8dae95e683da98bb438d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecef013df2e40cae4b8e7bdf5c38f5ea |
| publicationDate |
2001-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0111664-A1 |
| titleOfInvention |
Support container and semiconductor manufacturing/inspecting device |
| abstract |
A semiconductor manufacturing/inspecting device capable of cooling the whole uniformly in a short time. The semiconductor manufacturing/inspecting device in which ceramic base having a resistor heat generator is disposed in an opening of a bottomed support container is characterized in that a coolant supply pipe for communication of the inside of the support container with its outside is provided to the support container. |
| priorityDate |
1999-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |