http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0079564-A3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2000-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e21546b63609a1337d3e791540170228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba42ed570250168f482441d6ed984039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_008f16e56464330ee8b5f26508e5e6de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aabf57e4d50eaab0c8c0575fc73739e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e777055c2e68a80069952be003628e48 |
| publicationDate | 2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0079564-A3 |
| titleOfInvention | Plasma reactor with internal inductive antenna capable of generating helicon wave |
| abstract | The present invention employs an internal inductive antenna capable of generating a helicon wave for generating a plasma. One embodiment of the present invention employs loop type antenna secured within a bell shaped portion of the chamber. Another embodiment employs a flat coil type antenna secured within the chamber. In the preferred embodiments, the internal antenna of the present invention is constructed to prevent sputtering of the antenna. The antenna may be formed of a non-sputtering conductive material, or may form a conductive material surrounded, completely or partially, by a non-sputtering jacket. In one embodiment, the non-sputtering jacket may be coupled to the chamber wall so that heat generated by the antenna is transferred between the jacket and the chamber wall by conduction. Preferably, the non-sputtering jacket is formed of a material that also is electrically insulative with the surface of the antenna exposed to plasma being segmented to inhibit eddy current in conductive deposits. The gaps separate the exposed surface of the antennas so that conductive deposits are inhibited from electrically joining the separated surfaces, while inhibiting plasma generation within the gaps. A portion or all of the chamber wall may be constructed of electrically and thermally conductive material. |
| priorityDate | 1999-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.