patent/WO-0051174-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0051174-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_391152f24e3540e1dd113aed5b644edc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3892c48dde2ed2c6b3ac56aa8f0e0b6c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_90bba6a0ee7b1b40ba5b047e86b2997e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_846a275a13201f0d9be76bcff36c3ba9
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76882 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
filingDate	2000-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04c033b568c05e0caa5c3535e2427f20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bced04d92036e8a1baf325b4e50cd1b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d93c4872aab721529026d3c44d92929
publicationDate	2000-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	WO-0051174-A1
titleOfInvention	A method of processing a polymer layer
abstract	This invention relates to a method of processing polymer layers, for example low dielectric constant films, and includes the steps of heating the layer to desorb moisture and harden the layer and exposing the layer to a plasma during the heating process.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2394835-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309662-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852628-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7199474-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2394835-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03009341-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10146146-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6653247-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7662728-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6846757-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03009341-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10146146-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7301947-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1172845-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1172845-A3
priorityDate	1999-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5270267-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0519079-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0761841-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19654737-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155

Total number of triples: 54.