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filingDate 1999-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2000-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0040347-A1
titleOfInvention Non-corrosive cleaning composition and method for removing plasma etching residues
abstract Non-corrosive cleaning compositions that are useful for removing photoresist and plasma etch residues from a substrate. The cleaning composition comprises, by weight: (i) 30-70 % of a hydroxy-(lower alkyl)-hydrazine; (ii) 70-30 % of a water miscible organic solvent and (iii) 0-10 % water.
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type http://data.epo.org/linked-data/def/patent/Publication

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