| abstract |
An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens (14) which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined wiht low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask (24) may be used to define a plurality of steps (14a) in the resulting microlens (14) which have different diffractive characteristics. |