| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
1999-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_750a1d3a05f7bdd0220af3293d2363bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f89b88e9466c5e4f79d2f0908fa03ba3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc3091c084c37b727948361d729c13c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d6fc674ac23971baab73c9124dfbaec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_449848d48686c16939d1aaef30c069e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de21119e563ed73bf500e1db4634fe45 |
| publicationDate |
2000-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-0028588-A1 |
| titleOfInvention |
Multi-electrode electrostatic chuck having fuses in hollow cavities |
| abstract |
A failure resistant electrostatic chuck (20) for holding a substrate (35) during processing of the substrate (35) comprises one or more electrodes (25) covered by an insulator (30), the electrodes (25) capable of electrostatically holding a substrate (35) when a voltage is applied thereto. An electrical power bus (40) comprises one or more output terminals (45) that conduct voltage to the electrodes (25). The fuses (50) are positioned in hollow cavities (55) in the insulator (30), and electrically connect the electrodes (25) in series to the output terminals (45) of the power bus (40). Each fuse (50) can electrically disconnect an electrode (25) from an output terminal (45) when the insulator (30) covering the electrode (25) punctures and exposes the electrode (25) to a plasma process environment thereby causing a plasma current discharge to flow through the fuse (50). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009005921-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009005921-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7667944-B2 |
| priorityDate |
1998-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |