http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0026446-A1

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filingDate 1999-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15ebcc4d005a1c02c33306a0d74ba60b
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publicationDate 2000-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0026446-A1
titleOfInvention Method and system for measuring polycrystalline chunk size and distribution in the charge of a czochralski process
abstract A method and system for determining polycrystalline silicon chunk size for use with a Czochralski silicon growing process. Polycrystalline silicon chunks are arranged on a measuring background. A camera captures an image of the chunks. An image processor processes the image and determines the dimensions of the chunks based on the captured image. A size parameter associated with the chunks is determined.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1391252-A1
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Total number of triples: 24.