Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-02 |
filingDate |
1999-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15ebcc4d005a1c02c33306a0d74ba60b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93b81be9706925b93ac90b820c0fb660 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbb73a4ea2d27a01152e9e635703e634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d64e29def6c912818d273e01479f543b |
publicationDate |
2000-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-0026446-A1 |
titleOfInvention |
Method and system for measuring polycrystalline chunk size and distribution in the charge of a czochralski process |
abstract |
A method and system for determining polycrystalline silicon chunk size for use with a Czochralski silicon growing process. Polycrystalline silicon chunks are arranged on a measuring background. A camera captures an image of the chunks. An image processor processes the image and determines the dimensions of the chunks based on the captured image. A size parameter associated with the chunks is determined. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1391252-A1 |
priorityDate |
1998-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |