| abstract |
A synthetic quartz glass for optical use which is used through irradiation of rays of light from the ultraviolet region to the vacuum ultraviolet region, characterized in that the quartz glass contains fluorine and has a ratio of the intensity of a scattering peak at 2250 cm-1 (I ¿2250?) to that of a scattering peak at 800 cm?-1¿ (I ¿800?), that is I 2250/I 800, in a laser Raman spectrum of 1 x 10?-4¿ or less and an absorption coefficient of the light having a wave length of 245 nm of 2 x 10-3 cm-1 or less. |