http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0020841-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-171 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 |
| filingDate | 1999-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9f6de6386aa990fd81d34a1da06e2d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ae361574345a5e91c2c0437a4aa116c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_347ed8c040af4d7156425287ec518ccd |
| publicationDate | 2000-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0020841-A1 |
| titleOfInvention | Interferometric system for measurement disturbance of a sample |
| abstract | A pump beam (11) is modulated at a first frequency and a modulated pump beam is used to periodically heat the surface of a semiconductor wafer (20a) at a location, thereby generating a disturbance at such location. Two probe beams (36b, 36a) are provided which are coherent with each other having different frequencies or phase. One probe beam (36a) is directed towards the location where the disturbance is generated and the other probe beam (36b) is directed towards the sample surface (20a) at a location away from the disturbance so that it is substantially unaffected by the disturbance but is subject to substantially the same environmental factors as the location where the disturbance is generated. Reflections of the two probe beams are combined and interfere at a detector (50). The detector output is analyzed to provide the normalized amplitude of the sidebands for determining the physical characteristics or composition of the wafer, including the dose of any ion implants. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784993-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6583876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6831742-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6882421-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011064505-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2839154-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2953020-A1 |
| priorityDate | 1998-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.