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filingDate 2006-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-RE42338-E
titleOfInvention Capping layer for EUV optical elements
abstract Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C), boron nitride (BN), boron carbide (B 4 C), silicon nitride (Si 3 N 4 ), silicon carbide (SiC), B, Pd, Ru, Rh, Au, MgF 2 , LiF, C 2 F 4 and TiN and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.
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