patent/US-9989479-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989479-B1

Outgoing Links

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assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
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classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
filingDate	2016-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2018-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcbc97b8ad624ebc307790f385a9fcb7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db3df0e156fe6f0fbb12b0e800fd30f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a36be810966ba813131478652b54a51
publicationDate	2018-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-9989479-B1
titleOfInvention	System and method to determine depth for optical wafer inspection
abstract	A computer-based apparatus for adjusting an auto-focus in a wafer inspection system, including: a wafer adjustment system; and an electronic feedback loop system configured to compare an intensity of a first light beam rotating in a first spiral about a first central axis, and when the intensity is less than a preselected threshold, adjust, using the wafer adjustment system, a position of the wafer until the intensity reaches the preselected threshold.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109061876-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615067-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109061876-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112288745-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112288745-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957568-B1
priorityDate	2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541

Total number of triples: 48.