http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9984903-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68728 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate | 2017-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2d46585066cc529c25aa7d14adba053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_558717b207d72144d9e834e0f59c96c1 |
| publicationDate | 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9984903-B2 |
| titleOfInvention | Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus |
| abstract | A treatment cup cleaning method is provided, which includes: a rotating step of rotating a substrate rotating unit with a substrate being held by the substrate rotating unit; a cleaning liquid supplying step of supplying a cleaning liquid to an upper surface and a lower surface of the substrate and causing the cleaning liquid to scatter from a peripheral edge of the substrate to be applied to an inner wall of a treatment cup in the rotating step, whereby the cleaning liquid is supplied to the inner wall of the treatment cup; and a scattering direction changing step of changing a cleaning liquid scattering direction in which the cleaning liquid scatters from the peripheral edge of the substrate in the rotating step and the cleaning liquid supplying step. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017110355-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020251356-A1 |
| priorityDate | 2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.