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filingDate 2016-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38da1c79bc9db2a64ed767106fc386de
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publicationDate 2018-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9952510-B2
titleOfInvention Thinner composition
abstract A thinner composition includes propyleneglycol C1-C10 alkylether, C1-C10 alkyl C1-C10 alkoxy propionate, and C1-C10 alkyl lactate, thereby is it possible to improve applicability of a photoresist while remarkably reducing an amount of the used photoresist, as well as having excellent solubility and EBR property to various photoresists, BARCs and underlayers.
priorityDate 2015-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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