| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b86e27cd799c187f5d6aeca59d6d56ce |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-27 |
| filingDate |
2014-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c88d860ae0815a5db6ecaa53d56634b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a622567550917a6f100f3956a3dde04c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de67916052ef6637f9b4e247d97bc1d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_503b7d689428753e4fdfee610d1282b2 |
| publicationDate |
2018-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9952041-B2 |
| titleOfInvention |
Assessing alignment of top and bottom ends of TSVs and characterizing microfabrication process |
| abstract |
A method for characterizing a microfabrication process and the product thereof is described. A substrate having TSV's formed therein is assessed by determining the geometries and positions of the top and bottom ends of a TSV. Individual TSV's as well as the entire pattern of TSV's formed in a substrate may be assessed. |
| priorityDate |
2013-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |