http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9926193-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-938
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-014
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-0094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B1-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66227
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H59-00
filingDate 2014-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c87a42446efe0afe1250d212fa06174b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229d6db203ac0e1ae7b892d2442f1bfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a3aedc7efc2332ba6af5e4ab26b8103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0907f904852e294c5a8e34b2a7c7eba0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316253f6352d0bd98047a5e38ce1b127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af0b7561f3ab5032407bcd7ddd43253d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38c9902bac23881a59503e239f372508
publicationDate 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9926193-B2
titleOfInvention Magnetic nanomechanical devices for stiction compensation
abstract Nanoelectromechanical (NEMS) devices having nanomagnets for an improved range of operating voltages and improved control of dimensions of a cantilever are described. For example, in an embodiment, a nanoelectromechanical (NEMS) device includes a substrate layer, a first magnetic layer disposed above the substrate layer, a first dielectric layer disposed above the first magnetic layer, a second dielectric disposed above the first dielectric layer, and a cantilever disposed above the second dielectric layer. The cantilever bends from a first position to a second position towards the substrate layer when a voltage is applied to the cantilever.
priorityDate 2014-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010171575-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009278111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007209437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5278368-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013105286-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437

Total number of triples: 53.