| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87249
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K27-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K27-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K11-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-17 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K27-02 |
| filingDate |
2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_943ff9c91565e5469198e657e285b8f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3ad07a8f268c0dc4e84aa616618987f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a56f8ea62840d6bc8801bb73fefc9032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba2dac3c7224d2cb3d169407f0cdce7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_903893f13bb20805cdf6875ad720d0e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e533b71b95203574fd253470fa95c681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_563e8a734eaf8003a367b3de097f43c1 |
| publicationDate |
2018-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9920844-B2 |
| titleOfInvention |
Valve manifold deadleg elimination via reentrant flow path |
| abstract |
A gas delivery system for a substrate processing system includes first and second valves, a first gas channel, and a cylinder. The first valve includes a first inlet and a first outlet. The first outlet is in fluid communication with a processing chamber of the substrate processing system. The second valve includes a second inlet and a second outlet. The cylinder defines a second gas channel having a first end and a second end. The cylinder is at least partially disposed within the first gas channel such that the cylinder and the first gas channel collectively define a flow channel. The flow channel is in fluid communication with the first end of the second gas channel and with the first inlet. A third gas channel is in fluid communication with the second end of the second gas channel and with the second inlet. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I678494-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11661654-B2 |
| priorityDate |
2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |