| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41ac7ff6ab574ca3737b892da2ebfe6f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0525 |
| filingDate |
2016-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_102b11934171f5caf1532477ca285aa5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5a08c1ff66e645a3e9b88b99fe469c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_481bf2ec3d29f3f5f31cf16e3b9f9c4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74888e78617069f05d479557e59caa66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4855fc43504870e6a71d2bbc797d6265 |
| publicationDate |
2018-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9920426-B2 |
| titleOfInvention |
Method for producing lithium phosphorus oxynitride layer |
| abstract |
A method for producing a lithium phosphorus oxynitride layer having high ionic conductivity is provided. The method for producing a lithium phosphorus oxynitride layer on a substrate by atomic layer deposition comprises an atmosphere interchanging step, wherein the atmosphere surrounding the substrate is alternately switched between a first atmosphere, containing a first precursor such as a dialkyl phosphoramidate and/or alkyl phosphorodiamidate, and a second atmosphere, containing a second precursor such as a lithium hexaalkyl disilazide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022025515-A1 |
| priorityDate |
2015-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |