| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f316001c61f16359630eed5377481dcf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L35-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L35-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-06 |
| filingDate |
2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6009969bc4a1399173ed0caf8da009b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d80b1d3449ac5b9e68898bf2077de3b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebc847aef9966da05c7702f56d9dbf56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b693005101073416cda786be5fed6c70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6a7d0e3130b5d8157984ce2d0dcc8e3 |
| publicationDate |
2018-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9915567-B2 |
| titleOfInvention |
Unreleased thermopile infrared sensor using material transfer method |
| abstract |
An unreleased thermopile IR sensor and method of fabrication is provided which includes a new thermally isolating material and an ultra-thin material based sensor which, in combination, provide excellent sensitivity without requiring a released membrane structure. The sensor is fabricated using a wafer transfer technique in which a substrate assembly comprising the substrate and new thermally isolating material is bonded to a carrier substrate assembly comprising a carrier substrate and the ultra-thin material, followed by removal of the carrier substrate. As such, temperature restrictions of the various materials are overcome. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10749071-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10326044-B2 |
| priorityDate |
2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |