| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F15D1-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4411 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F15D1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2014-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec213ca362218f33857a4150781205cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d00cd3d1fb5b2fe4bbc1572787d76c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fb372bd1c1015cc794d6c9a8f76a553 |
| publicationDate |
2018-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9896761-B2 |
| titleOfInvention |
Trap assembly in film forming apparatus |
| abstract |
A trap mechanism for trapping exhaust gas from a process chamber. The trap assembly includes a housing containing a plurality of trap units. The plurality of trap units are arranged successively along a flow direction of said exhaust gas. Each trap unit includes a set of trap panels parallel to each other and spaced apart from each other. The two opposite surfaces with a larger area of each trap panel are oriented substantially parallel to a flow direction of the exhaust gas flow. The two opposite surfaces with a smaller area of each trap panels are oriented orthogonal to the exhaust gas flow. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019035653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11371142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017301524-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10808315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10366909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11348811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114285-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861681-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017120278-A1 |
| priorityDate |
2012-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |