http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9799526-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23P15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
filingDate 2015-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2e7c33f5bf1f254240242f52bfe4068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b67876e3a9fc903049da26f2afeac54d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8b2cb920bae741e8e1e9b1e2a34ff3e
publicationDate 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9799526-B2
titleOfInvention Liquid composition and etching method for etching silicon substrate
abstract An etching method includes etching a silicon substrate with a liquid composition containing an alkaline organic compound, water, and a boron compound with a content in the range of 1% by mass to 14% by mass. The boron compound is at least one of boron sesquioxide, sodium tetraborate, metaboric acid, sodium perborate, sodium borohydride, zinc borate, and ammonium borate.
priorityDate 2014-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015147852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012225563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009218542-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010278371-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014080313-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451219335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447860839
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449885306
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451916537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID186013
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451289241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453824854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524591
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510126
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22959485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450716330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525628
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454306093
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66200
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531083
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451404211
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161571
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4311764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15787660
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66241

Total number of triples: 81.