http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9796585-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00904 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 |
| filingDate | 2016-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_133a456791e7c47261a020b2349a5162 |
| publicationDate | 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9796585-B2 |
| titleOfInvention | Leak detection using cavity surface quality factor |
| abstract | A method of leak detection of hermetically sealed cavities semiconductor devices is provided. Scribe streets are formed with access from each packaged device on a first substrate to the edge of the first substrate. The first substrate is attached to a second substrate, forming gaps between the two substrates. A cavity is formed around a packaged device on the first substrate by attaching a bond ring to the first substrate and an optically transparent window above the bonding ring. The cavity is evacuated. A high powered laser beam strikes the top surface of the device on the first substrate within the cavity and creates a vertical surface displacement of the first substrate. The vertical surface displacement is monitored using a separate interrogation laser beam. Leakage of the cavity can be measured by characterizing the resonance decay rate, Q. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10132712-B1 |
| priorityDate | 2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.