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filingDate 2017-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f972e84702769b992aa14d98346d8260
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publicationDate 2017-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9793336-B2
titleOfInvention High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors
abstract An on-chip magnetic structure includes a palladium activated seed layer and a substantially amorphous magnetic material disposed onto the palladium activated seed layer. The substantially amorphous magnetic material includes nickel in a range from about 50 to about 80 atomic % (at. %) based on the total number of atoms of the magnetic material, iron in a range from about 10 to about 50 at. % based on the total number of atoms of the magnetic material, and phosphorous in a range from about 0.1 to about 30 at. % based on the total number of atoms of the magnetic material. The magnetic material can include boron in a range from about 0.1 to about 5 at. % based on the total number of atoms of the magnetic material.
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