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filingDate 2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9780092-B2
titleOfInvention Semiconductor device having a filling conductor comprising a plug portion and a cap portion and manufacturing method thereof
abstract A semiconductor device includes a semiconductor substrate and at least one gate stack. The gate stack is present on the semiconductor substrate, and the gate stack includes at least one work function conductor and a filling conductor. The work function conductor has a recess therein. The filling conductor includes a plug portion and a cap portion. The plug portion is present in the recess of the work function conductor. The cap portion caps the work function conductor.
priorityDate 2016-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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