| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f813a6b461f83eacd1f5e5e0b605bec7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D13-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D13-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-18 |
| filingDate |
2014-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7859d01da0006017f2c083ae5fc4bae9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07743377c4570f9c45c127a3782f7566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_319b1736eba3073d0d85b1e714f7b23b |
| publicationDate |
2017-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9765440-B2 |
| titleOfInvention |
Corrosion and erosion-resistant mixed oxide coatings for the protection of chemical and plasma process chamber components |
| abstract |
There is disclosed a method for producing corrosion and erosion-resistant mixed oxide coatings on a metal substrate, as well as a mixed oxide coating itself. A surface of the substrate metal is oxidized and converted into a first coating compound comprising a primary oxide of that metal by a plasma electrolytic oxidation (PEO) process. One or more secondary oxide compounds comprising oxides of secondary elements not present in conventional alloys of the substrate metals at significant (>2 wt %) levels are added to the first oxide coating. The source of the secondary element(s) is at least one of: i) a soluble salt of the secondary element(s) in the electrolyte; ii) an enrichment of the surface of the substrate metal with secondary element(s) prior to PEO processing; and iii) a suspension of the secondary element(s) or oxide(s) of the secondary element(s) applied to the oxide of the metal after this has been formed by the PEO process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11661650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4063540-A2 |
| priorityDate |
2013-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |