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filingDate 2014-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72bd85bb533c902ad8f2ba6f22166e8d
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publicationDate 2017-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9701871-B2
titleOfInvention Composition and method for polishing bulk silicon
abstract The invention provides a polishing composition comprising (a) silica, (b) one or more compounds that increases the removal rate of silicon, (c) one or more tetraalkylammonium salts, and (d) water, wherein the polishing composition has a pH of about 7 to about 11. The invention further provides a method of polishing a substrate with the polishing composition.
priorityDate 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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