| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_786a55964f0623938e701b4510cacfff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f521a279acc0253b2870a967488426a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_452caf27eff9d8fe92226f3560b86c73 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2014-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3219c79a1169bf81630f16f094b28ad9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3394e048c723de2750f117831fcbbde5 |
| publicationDate |
2017-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9659831-B2 |
| titleOfInvention |
Methods and structures for detecting low strength in an interlayer dielectric structure |
| abstract |
A method for manufacturing a semiconductor device is disclosed. The method includes generating a thermo-mechanical stress within a plurality of layers of a wafer, and after generating the thermo-mechanical stress, testing an interfacial strength level associated with one or more of the plurality of layers. |
| priorityDate |
2014-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |