| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf250ea20481cf63927c81b89d54ad0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74d375ed3bef5b2c211fd712dede4885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01375e5ad4a2cebb9f4215da0cd452f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75a213017db023db47a157020edd48af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3373b7ca74c39ad56cb8ce8037de33c3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2014-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40eac735360b84c9765baee5257b99ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea50b9bd0b74cf3e47ac569184311ead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd795cda6b44c46a9987f375dbe07be2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf9351a6d7cfb2b6f6ccdca03dbc0cf2 |
| publicationDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9653328-B2 |
| titleOfInvention |
Method and apparatus for surface treatment using inorganic acid and ozone |
| abstract |
An apparatus for treating a surface of an article includes a chamber for receiving an article to be treated. A dispenser dispenses a treatment liquid including inorganic acid onto the article. A tank stores the treatment liquid. An ozone generator communicates with a supply line entering or exiting the tank to mix ozone with the treatment liquid. A cooler cools the treatment liquid to a subambient temperature in a range of 3° C. to less than 20° C. A heater heats a surface of an article to be treated to a temperature at least 30° C. greater than a temperature of the treatment liquid when applied to the article. |
| priorityDate |
2010-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |