| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2242-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2001-4682 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-5009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-367
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-5036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B13-04 |
| filingDate |
2014-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd22b8af4aecabc91272f3586193a99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10224d6238e68f25c74e0355ab3bc933 |
| publicationDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9652567-B2 |
| titleOfInvention |
System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path |
| abstract |
Systems and methods for determining an RF transmission line model for an RF transmission system includes generating a baseline RF transmission line model characterizing the RF transmission system. A plasma RF voltage, RF current, RF power and/or a corresponding RF induced DC bias voltage is calculated from the baseline RF transmission line model. An end module including the electrostatic chuck, a plasma and an RF return path is added to the baseline RF transmission line model to create one or more revised RF transmission line models. A revised plasma RF voltage, a revised plasma RF current, a revised plasma RF power and/or a corresponding revised RF induced DC bias voltage is calculated from each of the revised baseline RF transmission line models. The revised RF transmission line models are scored to identify a best fitting revised RF transmission line model as a complete RF transmission line model. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971335-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018053633-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11348761-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410835-B2 |
| priorityDate |
2014-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |