http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9649743-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 |
| filingDate | 2016-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86238df507e4e3c70f4ae5b8ff5ff4b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55d997c9af108c1b2f376acf94b56229 |
| publicationDate | 2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9649743-B2 |
| titleOfInvention | Dynamically tracking spectrum features for endpoint detection |
| abstract | A method of controlling polishing includes polishing a substrate and receiving an identification of a selected spectral feature, a wavelength range having a width, and a characteristic of the selected spectral feature to monitor during polishing. A sequence of spectra of light from the substrate is measured while the substrate is being polished. A sequence of values of the characteristic of the selected spectral feature is generated from the sequence of spectra. For at least some spectra from the sequence of spectra, a modified wavelength range is generated based on a position of the spectral feature within a previous wavelength range used for a previous spectrum in the sequence of spectra, the modified wavelength range is searched for the selected spectral feature, and a value of a characteristic of the selected spectral feature is determined. |
| priorityDate | 2010-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.